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SEMI E125-0310 (technical revision)
大きなウェーハサイズへの移行によって，将来の半導体工場は広範囲に自動材料搬送システム（AMHS: automated material handling systems）を使用してウェーハキャリアを搬送することになる。これはFOUPおよびオープンカセットなどの重量の増加による。製造装置とAMHSの間のパラレル入出力（PI/O）制御信号は，製造装置ロードポートで，より確実でより効率的なキャリア移載（ロード／アンロード）のために十分に定義されなければならない。
It provides three classes of smaller diameter test wafers (through 125 mm)
from dispensing and inkjet printing to roll-to-roll printing and coating
only the x and y (or r and θ) coordinates are relevant
P04900 - SEMI P49 - Specification for Experimental Curvilinear Multigon Extension to SEMI P39 ElnTpc-Industry 4.0 SEMI E125-0310 (technical revision)NOTICE: This is a Preliminary Standard. Preliminary Standards are approved for publication by a single chapter of a technical global committee for information and comment prior to letter balloting for its adoption as a Full consensus Standard. Preliminary Standards are published for a period of no more than two years, unless a publication extension is granted by the International Standards Committee. This Preliminary Standard will be removed from