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Reticle Pod ID verification and Reticle Pod slot map verification
and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications
SEMI D19-0299E (editorial revision)
ここで扱う用語と定義は，
Equipment Communication Standards1 Messages Transfer (SECS-I) or the protocol defined in SEMI E37
E00400 - SEMI E4 - Specification for SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) Revision:SEMI E4-0699 (Reapproved 0307) - Superseded Reticle Pod ID verification andThis Standard provides a means for independent manufacturers to produce equipment and or hosts which can be connected without requiring specific knowledge of each other. The SECS I Standard defines a communication interface suitable for the exchange of messages between semiconductor processing equipment and a host. Semiconductor processing equipment includes equipment intended for wafer manufacturing, wafer processing, process measuring, assembly and
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