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Principal Analysts: Christian Gregor Dieseldorff and Clark Tseng
As a reference for the creation of technology-specific object model definitions
SEMI E39 — Specification for SECS-II Protocol for Object Services (OSS)
SEMI E40— Standard for Processing Management
SEMI E158 — Specification for Mechanical Features of Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling
C01900 - SEMI C19 - Specification for Acetone Revision:SEMI C19-0514 - Superseded Principal Analysts: Christian Gregor DieseldorffNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically