C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0920 If differences should exist between

If differences should exist between the English version and a translation in any other language

本書はパイプラインを通して授受される水素ガスにのみ適用される。シリンダ充填ガスまたは液体状のガスには適用されない。

種々の融着継手設計や製造者における比較のために本方法を使用する場合には，ユーザは評価されるべきチューブや融着継手を明確に選択しなければならない。

It applies to substrates whose nominal thickness specification is 1

it is necessary to consider two main situations:

C00354 - SEMI C3.54 - Gas Purity Guideline for Silane (SiH4) StdPbc-0920 If differences should exist betweenThis Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www. semiviews. org and www. semi. org in October 2011; originally published in 1997; previously published September 2006. NOTICE: This Document was balloted and approved for withdrawal in 2011. Silane is a pyrophoric, flammable colorless gas.